Characterization of PZT thick films derived from sol-gel techniques

被引:3
作者
Cheng, JR [1 ]
Luo, LQ [1 ]
Meng, ZY [1 ]
机构
[1] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 201800, Peoples R China
来源
FOURTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS | 2000年 / 4086卷
关键词
sol-gel; PZT thick films; internal bias field; self-poling; intrinsic piezoelectric responses;
D O I
10.1117/12.408336
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Crack free and preferred orientation Pb(ZrxTi1-x)O-3 (x = 0.45) thick films were prepared onto Pt(111)/Ti/TiO2/Si substrates by sol-gel and RTA techniques. Dielectric constants of PZT films increase with increasing the thickness. The as-prepared PZT films exhibited self-poling phenomenon and intrinsic piezoelectric responses. The PZT thick and thin films have different self-poling and poling effects. The internal bias field contributed to the intrinsic piezoelectric responses.
引用
收藏
页码:617 / 620
页数:4
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