Study of pyrolysis of polysilazane precursor in Si-C-(O,N) system

被引：12

作者：

Breuning, T ^{[1
]}

机构：

[1] Fraunhofer Inst Ceram Technol & Sintered Mat, D-01277 Dresden, Germany

来源：

JOURNAL OF ANALYTICAL AND APPLIED PYROLYSIS | 1999年 / 49卷 / 1-2期

关键词：

polysilazane; pyrolysis; methylchlorosilane; TG-MS; Py-GCIMS; DRIFTS;

D O I：

10.1016/S0165-2370(98)00096-5

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The pyrolytic transformation of a polysilazane precursor obtained by ammonolysis of distillation residues of the methylchlorosilane synthesis (Mueller-Rochow Synthesis) to ceramic in Si-C-(O,N) system was studied through the analysis of the gas phase by coupling of thermogravimetry with evolved gas analysis/mass spectrometry (TG-MS) and pyrolysis-gas chromatography-mass spectrometry (PY-GC/MS). Additionally characterization of partially pyrolyzed materials was performed using diffuse reflectance infrared fourier transformation spectroscopy (DRIFTS). (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：43 / 51

页数：9

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