Electroadhesive microgrippers

被引：53

作者：

Monkman, G ^{[1
]}

机构：

[1] Fachhsch Regensburg, Fachbereich Elektrotech, Mechatron Res Unit, Regensburg, Germany

来源：

INDUSTRIAL ROBOT-AN INTERNATIONAL JOURNAL | 2003年 / 30卷 / 04期

关键词：

adhesion; handling; assembly;

D O I：

10.1108/01439910310479595

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Describes the benefits of using electroadhesion when handling very delicate, polished and/or coated optical and electro-optical microcomponents. Electroadhesion is a technique already familiar to those working in the semiconductor industry and is eminently suitable for the handling of microcomponents in air, gas or vacuum.

引用

页码：326 / 330

页数：5