Standardization of field emission measurements

被引:54
作者
Zhirnov, VV [1 ]
Lizzul-Rinne, C
Wojak, GJ
Sanwald, RC
Hren, JJ
机构
[1] Semicond Res Corp, Res Triangle Pk, NC 27709 USA
[2] N Carolina State Univ, Raleigh, NC 27795 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2001年 / 19卷 / 01期
关键词
Field emission (FE) devices;
D O I
10.1116/1.1342006
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Interest in field emission and field emission devices has been renewed in the last 5 yr. This increase has been due to work on several new materials systems, which have shown promising field emission (FE) behavior. In turn, this interest gives impetus to the search for new FE sources. In order to move the technology ahead at a faster pace, there is a need for common ground rules and a ''standardization'' of the data reported so that it can be compared directly in a meaningful way and thereby accelerate the development process. In this article key factors affecting the FE data will be discussed and several parameters are suggested to initiate the process of developing a set of "standardized" FE parameters. A correct, or at least consistent, determination of characteristics such as work function, emission area, and field enhancement form the basis for developing a framework to make meaningful comparisons between different sets of data. (C) 2001 American Vacuum Society.
引用
收藏
页码:87 / 93
页数:7
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