On the effects of stresses in ferroelectric (Pb,Ca)TiO3 thin films

被引：65

作者：

Mendiola, J ^{[1
]}

Calzada, ML ^{[1
]}

Ramos, P ^{[1
]}

Martin, MJ ^{[1
]}

Agullo-Rueda, F ^{[1
]}

机构：

[1] CSIC, Inst Ciencia Mat, Madrid 28049, Spain

来源：

THIN SOLID FILMS | 1998年 / 315卷 / 1-2期

关键词：

dielectrics; phase transition; stress;

D O I：

10.1016/S0040-6090(97)00698-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Grazing angle X-ray diffraction, profilemetry, permittivity vs. temperature end Raman spectrometry measurements have been carried out on Ca-substituted lead titanate thin films prepared by sol-gel and deposited on Pt/TiO2/SiO2/(100)Si substrates. Films with thicknesses of 150 and 350 nm were obtained. The crystalline (Pb,Ca)TiO3 films were randomly oriented with a and c parameters slightly different from those of bulk ceramics. Profilemetry measurements indicated that the films were under tensile stresses, developed during the drying of the deposited wet layer and during the thermal treatment of crystallization of the amorphous film. These stresses were confirmed by the shift obtained in the Raman frequencies of these films. As a consequence of these stresses, a positive shift of the maximum of the permittivity vs. temperature is measured. (C) 1998 Elsevier Science S.A.

引用

页码：195 / 201

页数：7

共 26 条

[1] Effect of compositions and annealing conditions on the properties of sol-gel prepared calcium-modified lead titanate thin films [J].