Application of cathodic arc deposited amorphous hard carbon films to the head/disk tribology

被引：7

作者：

Anders, S ^{[1
]}

Bhatia, CS ^{[1
]}

Fong, W ^{[1
]}

Lo, RY ^{[1
]}

Bogy, DB ^{[1
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA

来源：

HIGH-DENSITY MAGNETIC RECORDING AND INTEGRATED MAGNETO-OPTICS: MATERIALS AND DEVICES | 1998年 / 517卷

关键词：

D O I：

10.1557/PROC-517-371

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Amorphous hard carbon films deposited by filtered cathodic are deposition exhibit very high hardness and elastic modulus, high mass density, low coefficient of friction, and the films are very smooth. All these properties are beneficial to applications of these films for the head/disk interface tribology. The properties of cathodic are deposited amorphous carbon films are summarized, and they are compared to sputter deposited, hydrogenated (CHx), and nitrogenated (CNx) carbon films which are the present choice for hard disk and slider coatings. New developments in cathodic are coaters are discussed which are of interest to the disk drive industry. Experiments on the nanotribology, mass density and hardness, corrosion behavior, and tribochemical behavior of cathodic are films are reported. A number of applications of cathodic are deposited films to hard disk and slider coatings are described. It is shown that their tribological performance is considerably better compared to CHx and CNx films.

引用

页码：371 / 382

页数：12