MEVVA ion source development and its industrial applications at Beijing Normal University

被引：24

作者：

Liu, AD ^{[1
]}

Zhang, HX ^{[1
]}

Zhang, TH ^{[1
]}

机构：

[1] Beijing Normal Univ, Inst Low Energy Nucl Phys, Beijing 100875, Peoples R China

来源：

SURFACE & COATINGS TECHNOLOGY | 2005年 / 193卷 / 1-3期

基金：

国家高技术研究发展计划(863计划);

关键词：

MEVVA ion source; industrial application;

D O I：

10.1016/j.surfcoat.2004.07.057

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Metal Vapor Vacuum Arc (MEVVA) ion source and ion implanter developed in Beijing Normal University (BNU) is introduced. The application in surface modification of materials with MEVVA ion implanter is reviewed. (c) 2004 Published by Elsevier B.V.

引用

页码：65 / 68

页数：4

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