Determination of the optical constants of diamond films with a rough growth surface

被引:33
作者
Yin, Z [1 ]
Tan, HS [1 ]
Smith, FW [1 ]
机构
[1] NANYANG TECHNOL UNIV,SCH ELECT & ELECT ENGN,CTR MICROELECT,SINGAPORE 2263,SINGAPORE
关键词
CVD diamond films; optical constants; surface roughness; interference;
D O I
10.1016/S0925-9635(96)00562-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The determination of the optical constants n and k for polycrystalline diamond films with typical growth surface roughness a of the order of tens to hundreds of nanometers is both an important and a difficult procedure. A method for determining n, k and a for rough diamond films is presented here. It is based on theoretical expressions for the optical reflectance R and transmittance T for a free-standing thin film incorporating the effects of surface scattering at one surface. The usefulness and validity of this approach are illustrated using experimental R and T data for diamond films. Simplified expressions for R and T are also presented which are valid when scattering or absorption are sufficiently strong to cause interference effects in the films to be averaged out. Prime novelty: Simple expressions for n, k and sigma are presented which will enable researchers to extract this important information about the optical constants and surface roughness of their CVD diamond films.
引用
收藏
页码:1490 / 1496
页数:7
相关论文
共 10 条
[1]  
EDWARDS DF, 1985, HDB OPTICAL CONSTANT, V1, P665
[2]   EFFECTS OF SAMPLE IMPERFECTIONS ON OPTICAL-SPECTRA [J].
FILINSKI, I .
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 1972, 49 (02) :577-+
[3]  
HEAVENS OS, 1991, OPTICAL PROPERTIES T, P57
[4]  
JENG DGK, 1991, P 2 INT C NEW DIAM S, P963
[5]  
Petrich R., 1994, Optical Materials, V3, P65, DOI 10.1016/0925-3467(94)90031-0
[6]  
ROBINS LH, 1995, DIAMOND FILM TECHNOL, V5, P199
[7]  
SASNZ G, 1988, SPIE, V969, P178
[8]  
SEAL M, 1988, P SOC PHOTO-OPT INS, V969, P144
[9]   TETRAHEDRON MODEL FOR THE OPTICAL DIELECTRIC FUNCTION OF HYDROGENATED AMORPHOUS-SILICON NITRIDE ALLOYS [J].
YIN, Z ;
SMITH, FW .
PHYSICAL REVIEW B, 1990, 42 (06) :3658-3665
[10]  
YIN Z, IN PRESS