Direct observation of hydrogen etching anisotropy on diamond single crystal surfaces

被引:71
作者
Cheng, CL [1 ]
Chang, HC [1 ]
Lin, JC [1 ]
Song, KJ [1 ]
Wang, JK [1 ]
机构
[1] NATL TAIWAN UNIV,CTR CONDENSED MATTER SCI,TAIPEI 106,TAIWAN
关键词
D O I
10.1103/PhysRevLett.78.3713
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Etching of natural diamonds by atomic hydrogen has been investigated on C(100), C(110), and C(111) single crystal surfaces. Infrared absorption spectroscopy and low-energy electron diffraction provide direct evidence for an etching anisotropy at 1100 K. The results indicate that, in the presence of atomic hydrogen, {111}-oriented facet formation irreversibly occurs on both C(110) and C(100), whereas C(111) remains intact. The finding has important implications for chemical vapor deposition diamond synthesis and H-plasma surface polishing.
引用
收藏
页码:3713 / 3716
页数:4
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