Standing-wave interferometer based on partially transparent photodiodes

被引：3

作者：

Büchner, HJ ^{[1
]}

Bunte, E ^{[1
]}

Mandryka, V ^{[1
]}

Stiebig, H ^{[1
]}

Jäger, G ^{[1
]}

机构：

[1] Tech Univ Ilmenau, Inst Measurement & Sensor Technol, D-98684 Ilmenau, Germany

来源：

OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION III | 2003年 / 5144卷

关键词：

interferometer; optical standing wave; displacement measurement; transparent photodetector;

D O I：

10.1117/12.499902

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A novel interferometer concept will be presented which is based on an optical standing wave. This standing wave is scanned by a novel, partially transparent photodetector, which is designed as nip-photodiode and contacted with transparent conductive oxide (TCO). Two transparent photodiodes are integrated to a transparent phase-sensitive sensor. The photodiodes are longitudinally arranged on the optical axis of the standing wave and generate a sine and a cosine signal for the up- and down-counting of the intensity maxima and minima of the standing wave. The layer thickness of the transparent photodiodes has been designed so as to take appropriate coating into account. These measures are demonstrated by a number of experimental results. An incorrect phase relation between the photodiodes will be corrected using the Heydemann algorithm. The non-linearity of the interferometer at a length of < lambda/2 will be discussed.

引用

页码：218 / 226

页数：9

共 15 条

[1]

Buchner H., 1983, Patent No. [DE 3300369 C2, 3300369]

[2]

Büchner HJ, 2003, MEAS SCI TECHNOL, V14, P311, DOI 10.1088/0957-0233/14/3/309

[3]

BUCHNER HJ, 1988, TECHNIQUE MEASUREMEN, V6, P146

[4] A PROPOSED DESIGN FOR A POLARIZATION-INSENSITIVE OPTICAL INTERFEROMETER SYSTEM WITH SUBNANOMETRIC CAPABILITY [J].

DOWNS, MJ ;

ROWLEY, WRC .

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1993, 15 (04) :281-286

[5]

FUEST R, 1990, ESI PUBLICATION OPTO, P48

[6] DETERMINATION AND CORRECTION OF QUADRATURE FRINGE MEASUREMENT ERRORS IN INTERFEROMETERS [J].

HEYDEMANN, PLM .

APPLIED OPTICS, 1981, 20 (19) :3382-3384

[7]

JAGER SG, 2001, ANN M ASPE CRYST CIT

[8] INTEGRATED-OPTIC INTERFEROMETRIC MICRODISPLACEMENT SENSOR IN GLASS WITH THERMOOPTIC PHASE MODULATION [J].

JESTEL, D ;

BAUS, A ;

VOGES, E .

ELECTRONICS LETTERS, 1990, 26 (15) :1144-1145

[9]

KLUTH O, 2001, IN PRESS 17 EUR PHOT, P22

[10]

KUNZMANN H, 1979, ANN CIRP, V28, P311

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