Pyroelectric and piezoelectric properties of thick PZT films produced by a new sol-gel route

被引:31
作者
Es-Souni, A [1 ]
Kuhnke, M [1 ]
Piorra, A [1 ]
Solterbeck, CH [1 ]
机构
[1] Univ Appl Sci, IMST, Kiel, Germany
关键词
sol-gel processes; microstructure-final; piezoelectric properties; PZT; functional applications;
D O I
10.1016/j.jeurceramsoc.2005.03.090
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The pyroelectric and piezoelectric properties of thick PZT films processed via a new sol-gel method are being investigated. The films were deposited on gold-coated alumina substrates. The pyroelectric properties are being evaluated using pyrodynamic measurements with either a laser or thermoelectric heat source. The pyroelectric coefficient is obtained from pyroelectric current measurements. The piezoelectric properties are being measured using a laser vibrometer-lock-in amplifier set-up. It is shown that the pyroelectric coefficient obtained with laser heating lies in the range of 108 mu C/m(2) K, whereas heating from the rear of the specimen with the thermoelectric element lead to a value of in the range of 350 mu C/m(2) K, These results are explained in terms through thickness temperature gradients. The piezoelectric displacement amplitude versus applied voltage shows a no-linear behaviour, which is explained in terms of materials chemistry. The maximum effective piezoelectric coefficient, d(33), is obtained as 340 pm/V, and is superior to the values known for ferroelectric thin films. (c) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:2499 / 2503
页数:5
相关论文
共 8 条
[1]   The role of connectivity in thermal imaging [J].
Amin, A .
JOURNAL OF ELECTROCERAMICS, 2002, 8 (02) :99-106
[2]   Characterization of thick lead zirconate titanate films fabricated using a new sol gel based process [J].
Barrow, DA ;
Petroff, TE ;
Tandon, RP ;
Sayer, M .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (02) :876-881
[3]   Processing and characterization of high quality thick PZT films [J].
Es-Souni, M ;
Piorra, A ;
Solterbeck, CH .
FERROELECTRICS, 2003, 293 :63-68
[4]  
Lang S.B., 2001, HDB ADV ELECT PHOTON, V4, P1, DOI DOI 10.1016/B978-012513745-4/50036-6
[5]   Effects of thickness on the piezoelectric and dielectric properties of lead zirconate titanate thin films [J].
Lian, L ;
Sottos, NR .
JOURNAL OF APPLIED PHYSICS, 2000, 87 (08) :3941-3949
[6]  
Moulson AJ., 2003, Electroceramics, V2, DOI [10.1002/0470867965, DOI 10.1002/0470867965]
[7]   Ferroelectric thin films in microelectromechanical systems applications [J].
Polla, DL ;
Francis, LF .
MRS BULLETIN, 1996, 21 (07) :59-65
[8]  
WHATMORE RW, 2001, INFRARED DETECTORS E, P120