Electrochemical pattern formation in a scanning near-field optical microscope

Combining a scanning ion conductance microscope (SICM) probe with a scanning near-field optical microscope, we have obtained a new scanning probe microscope, which allows electrochemical surface modification and simultaneous near-field optical observation of the lithographic process. In this paper, the operation is demonstrated in principle using a CuSO4 solution and a sample which is electrically conductive and transparent in the visible region (ITO coated glass). We also present some details such as shear force distance control in liquids and light guiding in pulled and filled micropipettes. Macroscopic experiments demonstrate localized deposition and allow to estimate parameters for microscopic deposition. Diameters of first deposited dots are smaller than 1 mu m.