Size effects on the mechanical behavior of gold thin films

被引：149

作者：

Espinosa, HD ^{[1
]}

Prorok, BC ^{[1
]}

机构：

[1] Northwestern Univ, Dept Mech Engn, Evanston, IL 60208 USA

来源：

JOURNAL OF MATERIALS SCIENCE | 2003年 / 38卷 / 20期

基金：

美国国家科学基金会;

关键词：

Dislocation motion - Membrane deflection experiment - Nanoindenter load - Size effects - Yield stress variation;

D O I：

10.1023/A:1026321404286

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The Membrane Deflection Experiment was used to test the mechanical response of freestanding thin film gold specimens. We present stress-strain curves obtained on films 0.3, 0.5, and 0.1 mum thick. Elastic modulus was consistently measured in the range of 53-55 GPa. Several size effects on the mechanical properties were observed including yield stress variations with membrane width and film thickness. It was observed that a width of 2.5 mum and a thickness of 0.5 mum correspond to major transitions in the material deformation behavior. (C) 2003 Kluwer Academic Publishers.

引用

页码：4125 / 4128

页数：4

共 12 条

[1] Mechanical properties of thin polysilicon films by means of probe microscopy [J].