Temperature dependent H2S and Cl2 sensing selectivity of Cr2O3 thin films

被引：59

作者：

Balouria, Vishal ^{[1
,2
]}

Kumar, Arvind ^{[1
]}

Singh, A. ^{[1
]}

Samanta, S. ^{[1
]}

Debnath, A. K. ^{[1
]}

Mahajan, Aman ^{[2
]}

Bedi, R. K. ^{[2
]}

Aswal, D. K. ^{[1
]}

Gupta, S. K. ^{[1
]}

Yakhmi, J. V. ^{[1
]}

机构：

[1] Bhabha Atom Res Ctr, Tech Phys Div, Bombay 400085, Maharashtra, India

[2] Gurunanak Dev Univ, Dept Phys, Amritsar 143005, Punjab, India

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2011年 / 157卷 / 02期

关键词：

Cr2O3 thin films; Gas sensing; XPS; Adsorbed oxygen; OXIDE; GAS; ZNO; RESISTORS;

D O I：

10.1016/j.snb.2011.05.002

中图分类号：

O65 [分析化学];

学科分类号：

070302 [分析化学];

摘要：

The conductometric gas sensing characteristics of Cr2O3 thin films - prepared by electron-beam deposition of Cr films on quartz substrate followed by oxygen annealing - have been investigated for a host of gases (CH4, CO, NO2, Cl-2, NH3 and H2S) as a function of operating temperature (between 30 and 300 degrees C) and gas concentration (1-30 ppm). We demonstrate that these films are highly selective to H2S at an operating temperature of 100 degrees C, while at 220 degrees C the films become selective to Cl-2. This result has been explained on the basis of depletion of chemisorbed oxygen from the surface of films due to temperature and/or interaction with Cl-2/H2S, which is supported experimentally by carrying out the work function measurements using Kelvin probe method. The temperature dependent selectivity of Cr2O3 thin films provides a flexibility to use same film for the sensing of Cl-2 as well as H2S. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：466 / 472

页数：7

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