Improved room-temperature continuous wave GaAs/AlGaAs and InGaAs/GaAs/AlGaAs lasers fabricated on Si substrates via relaxed graded GexSi1-x buffer layers

被引:52
作者
Groenert, ME
Pitera, AJ
Ram, RJ
Fitzgerald, EA
机构
[1] MIT, Dept Mat Sci, Cambridge, MA 02139 USA
[2] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2003年 / 21卷 / 03期
关键词
D O I
10.1116/1.1576397
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Improved GaAs/AlGaAs quantum well lasers were fabricated with longer lifetimes, higher efficiencies, and lower threshold current densities than previously reported devices on Ge/GeSi relaxed graded buffers on Si substrates. Uncoated broad-area lasers operated continuously at 858 nm with a differential quantum efficiency of 0.40 and a threshold current density of 269 A/cm(2). Similar devices fabricated on GaAs substrates demonstrated nearly identical performance. Operating lifetimes on Si substrates were nearly 4 h, a 1 order of magnitude improvement over previous devices. In addition, strained InGaAs quantum well lasers have been operated continuously at room temperature on Ge/GeSi/Si substrates with a differential quantum efficiency of 0.26 and a threshold current density of 700 A/cm(2). Electroluminescence analyses of the failure behavior of both types of devices have suggested that recombination-enhanced defect reactions are limiting laser lifetime on Si substrates. (C) 2003 American Vacuum Society.
引用
收藏
页码:1064 / 1069
页数:6
相关论文
共 23 条
[1]  
*CAB INC, SEM 25 CONC POL SLUR
[2]   High efficiency GaAs-on-Si solar cells with high Voc using graded GeSi buffers [J].
Carlin, JA ;
Hudait, MK ;
Ringel, SA ;
Wilt, DM ;
Clark, EB ;
Leitz, CW ;
Currie, M ;
Langdo, T ;
Fitzgerald, EA .
CONFERENCE RECORD OF THE TWENTY-EIGHTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 2000, 2000, :1006-1011
[3]   GAAS-BASED DIODE-LASERS ON SI WITH INCREASED LIFETIME OBTAINED BY USING STRAINED INGAAS ACTIVE LAYER [J].
CHOI, HK ;
WANG, CA ;
KARAM, NH .
APPLIED PHYSICS LETTERS, 1991, 59 (21) :2634-2635
[4]  
Coldren L. A., 2012, DIODE LASERS PHOTONI, V218
[5]   Controlling threading dislocation densities in Ge on Si using graded SiGe layers and chemical-mechanical polishing [J].
Currie, MT ;
Samavedam, SB ;
Langdo, TA ;
Leitz, CW ;
Fitzgerald, EA .
APPLIED PHYSICS LETTERS, 1998, 72 (14) :1718-1720
[6]   EFFECTS OF MICROCRACKING ON ALXGA1-XAS-GAAS QUANTUM WELL LASERS GROWN ON SI [J].
DEPPE, DG ;
HALL, DC ;
HOLONYAK, N ;
MATYI, RJ ;
SHICHIJO, H ;
EPLER, JE .
APPLIED PHYSICS LETTERS, 1988, 53 (10) :874-876
[7]   OPTICAL AND ELECTRICAL DEGRADATIONS OF GAAS-BASED LASER-DIODES GROWN ON SI SUBSTRATES [J].
EGAWA, T ;
JIMBO, T ;
HASEGAWA, Y ;
UMENO, M .
APPLIED PHYSICS LETTERS, 1994, 64 (11) :1401-1403
[8]  
FITZGERALD EA, 1995, ANNU REV MATER SCI, V25, P417
[9]   Wafer-scale integration of GaAs optoelectronic devices with standard Si integrated circuits using a low-temperature bonding procedure [J].
Georgakilas, A ;
Deligeorgis, G ;
Aperathitis, E ;
Cengher, D ;
Hatzopoulos, Z ;
Alexe, M ;
Dragoi, V ;
Gösele, U ;
Kyriakis-Bitzaros, ED ;
Minoglu, K ;
Halkias, G .
APPLIED PHYSICS LETTERS, 2002, 81 (27) :5099-5101
[10]   Monolithic integration of room-temperature cw GaAs/AlGaAs lasers on Si substrates via relaxed graded GeSi buffer layers [J].
Groenert, ME ;
Leitz, CW ;
Pitera, AJ ;
Yang, V ;
Lee, H ;
Ram, RJ ;
Fitzgerald, EA .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (01) :362-367