Material-vapor dynamics during ablation withultrashort pulses

被引:6
作者
Breitling, D [1 ]
Müller, KP [1 ]
Ruf, A [1 ]
Berger, P [1 ]
Dausinger, F [1 ]
机构
[1] Univ Stuttgart, Inst Strahlwerkzeuge, IFSW, D-70569 Stuttgart, Germany
来源
FOURTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION | 2003年 / 5063卷
关键词
laser ablation; ultrashort pulses; material vapor; plasma diagnostics;
D O I
10.1117/12.540608
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We have studied ablation plumes generated by femtosecond and picosecond-laser pulses using various optical methods for both single-pulse ablation as well as for drilling with up to 1 kHz repetition rate. Time-resolved shadow and resonance-absorption photographs visualize the plume- and vapor-expansion behavior in the nanosecond- and microsecond-time domains whereas the detection of Mie-scattered 308 nm-radiation allows to qualify the vapor movement and accumulation up to several milliseconds, i.e. well beyond the corresponding pulse-to-pulse separation at 1 kHz repetition rate.
引用
收藏
页码:81 / 86
页数:6
相关论文
共 8 条
[1]  
BREITLING D, 2002, IN PRESS P SPIE
[2]   LASER-INDUCED FLUORESCENCE STUDIES OF EXCIMER LASER ABLATION OF AL2O3 [J].
DREYFUS, RW ;
KELLY, R ;
WALKUP, RE .
APPLIED PHYSICS LETTERS, 1986, 49 (21) :1478-1480
[3]   Gas-phase nanoparticle formation and transport during pulsed laser deposition of Y1Ba2Cu3O7-d [J].
Geohegan, DB ;
Puretzky, AA ;
Rader, DJ .
APPLIED PHYSICS LETTERS, 1999, 74 (25) :3788-3790
[4]   DYNAMICS OF EXCIMER LASER-ABLATED ALUMINUM NEUTRAL ATOM PLUME MEASURED BY DYE-LASER RESONANCE-ABSORPTION PHOTOGRAPHY [J].
GILGENBACH, RM ;
VENTZEK, PLG .
APPLIED PHYSICS LETTERS, 1991, 58 (15) :1597-1599
[5]  
GRIEM HR, 1964, PLASMA SPECTROSCOPY, P405
[6]  
KLIMENTOV SM, 2002, IN PRESS P SPIE
[7]   Investigations of single-wall carbon nanotube growth by time-restricted laser vaporization [J].
Puretzky, AA ;
Schittenhelm, H ;
Fan, XD ;
Lance, MJ ;
Allard, LF ;
Geohegan, DB .
PHYSICAL REVIEW B, 2002, 65 (24) :2454251-2454259
[8]  
ZELDOVICH YB, 1967, PYS SHOCK WAVES HIGH, V2