Multi-element thermo-capillary optical switch and sub-nanoliter oil injection for its fabrication

被引：19

作者：

Togo, H ^{[1
]}

Sato, M ^{[1
]}

Shimokawa, F ^{[1
]}

机构：

[1] NTT, Optoelect Labs, Musashino, Tokyo 1808585, Japan

来源：

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 1999年

关键词：

D O I：

10.1109/MEMSYS.1999.746865

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

To improve our previously proposed micromechanical optical switch based on the liquid flow induced by thermo-capillarity, in this paper we explain a new technique for injecting sub-nanoliter quantities of liquid that is necessary for thermo-capillary optical switches. To fabricate a multi-element switch, the oil must be encapsulated in all the switch elements uniformly and simultaneously. We have successfully demonstrated oil injection in a switch with eight elements that provides back-up sharing. The volume of the injected oil was 66 +/- 6 pi. Switching was successfully performed in all switch elements.

引用

页码：418 / 423

页数：6

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