Factors influencing the gas sensing characteristics of tin dioxide films deposited by spray pyrolysis: understanding and possibilities of control

被引：96

作者：

Brinzari, V

Korotcenkov, G

Golovanov, V

机构：

[1] Tech Univ Moldova, Dept Microelect, MD-2004 Kishinev, MD, Moldova

[2] Odessa II Mechnikov State Univ, Fac Phys, UA-65100 Odessa, Ukraine

来源：

THIN SOLID FILMS | 2001年 / 391卷 / 02期

关键词：

SnO2 thin film; spray pyrolysis; gas sensor parameters; optimization;

D O I：

10.1016/S0040-6090(01)00978-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The main structure and electronic parameters of SnO2 thin films are considered from the point of view of optimization gas sensor characteristics. The results of phenomenological modeling and their comparison with experiments are used for choosing the correct film parameters and modes of deposition for the processing of SnO2 films by the spray pyrolysis method. Optimal deposition conditions were found, allowing one to obtain films with improved sensitivity, selectivity, low temperature sensitivity maximum position and low response times without additional doping by metal catalysts. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：167 / 175

页数：9

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