A miniature mass spectrometer for chemical and biological sensing

被引：16

作者：

Taylor, S ^{[1
]}

Srigengan, B ^{[1
]}

Gibson, JR ^{[1
]}

Tindall, D ^{[1
]}

Syms, R ^{[1
]}

Tate, T ^{[1
]}

Ahmad, M ^{[1
]}

机构：

[1] Univ Liverpool, Dept Elect Engn & Elect, Liverpool L69 3GJ, Merseyside, England

来源：

CHEMICAL AND BIOLOGICAL SENSING | 2000年 / 4036卷

关键词：

mass spectrometry; microengineering; sensors; gas detection;

D O I：

10.1117/12.394074

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An experimental study has been carried out using a Miniature Quadrupole Mass Spectrometer (MicroQuad) for gas analysis. Conventional quadrupole rods have been replaced with a micromachined mass filter made from silicon with Au metallised specially drawn glass fibres of length 30 mm and diameter 0.5 mm. A standard hot filament ion source and both Faraday detection and a channel electron multiplier have been used. The effect of ion focus voltage has also been modelled by SIMION simulation. Conventional electronics were adapted to run at 6 to 8MHz and mass spectra in the range 0-50 a.m.u. The results indicate a good valley separation between O, OH, H2O and Ar2+ and a best resolution at 10% peak height of 0.9 a.m.u at mass 40 with the multiplier. Application of a static magnetic field transversely to the body of the mass filter is shown to improve resolution howbeit at the expense of ion transmission through the filter.

引用

页码：187 / 193

页数：7

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