Self-propagating high-temperature synthesis and solid-phase reactions in bilayer thin films

被引：19

作者：

Myagkov, VG ^{[1
]}

Zhigalov, VS ^{[1
]}

Bykova, LE ^{[1
]}

Mal'tsev, VK ^{[1
]}

机构：

[1] Russian Acad Sci, Siberian Branch, LV Kirensky Phys Inst, Krasnoyarsk 660036, Russia

来源：

TECHNICAL PHYSICS | 1998年 / 43卷 / 10期

基金：

俄罗斯基础研究基金会;

关键词：

D O I：

10.1134/1.1259177

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Self-propagating high-temperature synthesis (SHS) in Al/Ni, Al/Fe, and Al/Co bilayer thin films is investigated. It is established that SHS is achieved in thin films at initiation temperatures 300-350 degrees lower than in powders. The mechanism of SHS in thin films is similar to the process of explosive crystallization. It is shown that at the initial stage solid-phase reactions arising on the contact surface of condensate films can be self-propagating high-temperature synthesis. SHS could find application in different technologies for obtaining film components for microelectronics. (C) 1998 American Institute of Physics. [S1063-7842(98)01010-1].

引用

页码：1189 / 1192

页数：4

共 14 条

[1]

[Anonymous], LASER ELECT BEAM PRO

[2]

[Anonymous], SOV PHYS USP

[3] THE PROPAGATION OF A SOLID-STATE COMBUSTION WAVE IN NI-AL FOILS [J].

ANSELMITAMBURINI, U ;

MUNIR, ZA .

JOURNAL OF APPLIED PHYSICS, 1989, 66 (10) :5039-5045

[4]

CAHN RW, 1983, PHYSICAL METALLURGY, V2

[5]

COLDAN EQ, 1995, J APPL PHYS, V77, P614

[6]

GRIGOREV IS, 1991, PHYSICAL CONSTANTS

[7]

LARIKOV VN, 1987, STRUCTURE PROPERTIES

[8]

MERZHANO.AG, 1972, DOKL AKAD NAUK SSSR+, V204, P366

[9]

Merzhanov A. G., 1983, PHYSICAL CHEM MODERN, P6

[10] AUTOWAVE OXIDATION OF DY-CO FILMS [J].

MIAGKOV, VG ;

KVEGLIS, LI ;

FROLOV, GI ;

ZHIGALOV, VS .

JOURNAL OF MATERIALS SCIENCE LETTERS, 1994, 13 (17) :1284-1286

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