Synthesis of nanostructured TiN using a two-step transition metal halide approach

被引:30
作者
Choi, DW
Kumta, PN [1 ]
机构
[1] Carnegie Mellon Univ, Dept Mat Sci & Engn, Pittsburgh, PA 15213 USA
[2] Carnegie Mellon Univ, Dept Biomed Engn, Pittsburgh, PA 15213 USA
关键词
D O I
10.1111/j.1551-2916.2005.00367.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A two-step transition metal halide approach has been developed for synthesizing uniform ultra-fine titanium nitride (TiN) nanocrystallites (< 10 nm) at relatively low temperatures of 400 degrees C. The nano-sized TiN crystallites were obtained by reacting liquid titanium tetrachloride dissolved in anhydrous chloroform with anhydrous NH3 gas at room temperature followed by heat treatment under ultra-high-purity Ar, N-2, and anhydrous NH3 atmosphere. The synthesized TiN nano-crystallites were characterized by X-ray diffraction, Brunauer-Emmett-Teller, pycnometer, differential thermal analysis/thermo-gravimetric analysis, and high-resolution transmission electron microscopy. The effect of the heat treatment temperature and atmosphere (Ar, N-2, and NH3) on the specific surface area, density, crystal structure, and composition is discussed.
引用
收藏
页码:2030 / 2035
页数:6
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