Optical power induced damage to microelectromechanical mirrors

被引：87

作者：

Burns, DM

Bright, VM ^{[1
]}

机构：

[1] Univ Colorado, Dept Mech Engn, Boulder, CO 80309 USA

[2] USAF, Inst Technol, Dept Elect & Comp Engn, Wright Patterson AFB, OH 45433 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 70卷 / 1-2期

关键词：

polysilicon; microelectromechanical systems (MEMS); micromirror; micro-optics;

D O I：

10.1016/S0924-4247(98)00106-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the results of an investigation of optical power induced damage to surface-micromachined micromirrors. A mathematical model was developed and used to predict the minimum incident optical power that will permanently damage the reflective surface of a micromirror. The model is based on a heat how analysis of a microelectromechanical systems (MEMS) device in thermal equilibrium under continuous direct illumination, and has been validated using a variety of micromirror designs with both thermal simulation and direct laser illumination. (C) 1998 Published by Elsevier Science S.A. All rights reserved.

引用

页码：6 / 14

页数：9

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