A room temperature indium tin oxide/quartz crystal microbalance gas sensor for nitric oxide

被引：42

作者：

Hu, JQ

Zhu, FR

Zhang, J

Gong, H

机构：

[1] Natl Univ Singapore, Dept Mat Sci, Singapore 119260, Singapore

[2] Inst Mat Res & Engn, Singapore 117602, Singapore

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2003年 / 93卷 / 1-3期

关键词：

indium tin oxide; quartz crystal; gas sensing mechanisms;

D O I：

10.1016/S0925-4005(03)00186-2

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Nitric oxide (NO) gas sensor using a combination of indium tin oxide (ITO) and quartz crystal microbalance is fabricated. The sensor is made from the polished AT-cut quartz crystal on which the ITO thin film is deposited using radio frequency magnetron sputtering. The sensor is sensitive to NO gas at room temperature and avoids the problems related to elevated-temperature sensors. It is shown that the sensor has a distinct negative frequency shift of 110 Hz within 600 s when it is exposed to 60 ppm of NO. The frequency-changing rate is also found to increase with NO concentration. The chemical status of elements on the ITO surface before and after NO adsorption is investigated by X-ray photoelectron spectroscopy (XPS). Possible gas sensing mechanisms are discussed. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：175 / 180

页数：6

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