Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

被引：30

作者：

Burnett, JH ^{[1
]}

Kaplan, S ^{[1
]}

机构：

[1] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA

来源：

OPTICAL MICROLITHOGRAPHY XVI, PTS 1-3 | 2003年 / 5040卷

关键词：

index of refraction; refractive index; thermo-optic coefficient; 193 nm immersion lithography;

D O I：

10.1117/12.504601

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We discuss our approaches for measuring the absolute index (n), and its dependencies on wavelength (dn/dlambda) and temperature (dn/dT), of high-purity Water for wavelengths near 193 nm, using the minimum deviation prism method and an interferometric technique. We present preliminary results for these quantities measured by the minimum deviation method.

引用

页码：1742 / 1749

页数：8

共 12 条

[1] SURF III - an improved storage ring for radiometry [J].

Arp, U ;

Friedman, R ;

Furst, ML ;

Makar, S ;

Shaw, PS .

METROLOGIA, 2000, 37 (05) :357-360

[2] AN UPDATED EDLEN EQUATION FOR THE REFRACTIVE-INDEX OF AIR [J].

BIRCH, KP ;

DOWNS, MJ .

METROLOGIA, 1993, 30 (03) :155-162

[3]

Born M., 1999, PRINCIPLES OPTICS, P190

[4] Absolute refractive indices and thermal coefficients of CaF2, SrF2, BaF2, and LiF near 157 nm [J].

Burnett, JH ;

Gupta, R ;

Griesmann, U .

APPLIED OPTICS, 2002, 41 (13) :2508-2513

[5] HIGH-CURRENT HOLLOW-CATHODE AS A RADIOMETRIC TRANSFER STANDARD SOURCE FOR THE EXTREME VACUUM ULTRAVIOLET [J].

DANZMANN, K ;

GUNTHER, M ;

FISCHER, J ;

KOCK, M ;

KUHNE, M .

APPLIED OPTICS, 1988, 27 (23) :4947-4951

[6] INFRARED REFRACTIVE-INDEX OF SILICON [J].

EDWARDS, DF ;

OCHOA, E .

APPLIED OPTICS, 1980, 19 (24) :4130-4131

[7] The NIST FT700 Vacuum Ultraviolet Fourier Transform Spectrometer: applications in ultraviolet spectrometry and radiometry [J].

Griesmann, U ;

Kling, R ;

Burnett, JH ;

Bratasz, L .

ULTRAVIOLET ATMOSPHERIC AND SPACE REMOTE SENSING: METHODS AND INSTRUMENTATION II, 1999, 3818 :180-188

[8] Absolute refractive indices and thermal coefficients of fused silica and calcium fluoride near 193 nm [J].

Gupta, R ;

Burnett, JH ;

Griesmann, U ;

Walhout, M .

APPLIED OPTICS, 1998, 37 (25) :5964-5968

[9] Revised formulation for the refractive index of water and steam as a function of wavelength, temperature and density [J].

Harvey, AH ;

Gallagher, JS ;

Sengers, JMHL .

JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA, 1998, 27 (04) :761-774

[10] REFRACTOMETRY BY MINIMUM DEVIATION - ACCURACY ANALYSIS [J].

TENTORI, D ;

LERMA, JR .

OPTICAL ENGINEERING, 1990, 29 (02) :160-168

← 1 2 →