Oxygen vacancy migration and time-dependent leakage current behavior of Ba0.3Sr0.7TiO3 thin films -: art. no. 112904

被引:89
作者
Meyer, R [1 ]
Liedtke, R [1 ]
Waser, R [1 ]
机构
[1] Rhein Westfal TH Aachen, Inst Werkstoffe Elektrotech, D-52056 Aachen, Germany
关键词
D O I
10.1063/1.1874313
中图分类号
O59 [应用物理学];
学科分类号
摘要
The leakage current response of high-permittivity columnar-grown (Ba,Sr)TiO3 thin films has been studied at elevated temperatures under dc load. We observe a thermally activated current prior to the onset of the resistance degradation with an activation energy of E-A=1.1 eV. A point defect model is applied to calculate the migration of electronic and ionic defects under the dc field as well as the current response of the system. We find that the peak in current is not caused by a space-charge-limited transient of oxygen vacancies, but related to a modulation of the electronic conductivity upon oxygen vacancy redistribution. Furthermore, we show that after the redistribution of electronic and ionic defects, no further increase in conductivity takes place in the simulation. (C) 2005 American Institute of Physics.
引用
收藏
页码:1 / 3
页数:3
相关论文
共 21 条
  • [1] Basceri C, 1998, MATER RES SOC SYMP P, V493, P9
  • [2] A model for fatigue in ferroelectric perovskite thin films
    Dawber, M
    Scott, JF
    [J]. APPLIED PHYSICS LETTERS, 2000, 76 (08) : 1060 - 1062
  • [3] Leakage currents in Ba0.7Sr0.3TiO3 thin films for ultrahigh-density dynamic random access memories
    Dietz, GW
    Schumacher, M
    Waser, R
    Streiffer, SK
    Basceri, C
    Kingon, AI
    [J]. JOURNAL OF APPLIED PHYSICS, 1997, 82 (05) : 2359 - 2364
  • [4] Ellerkmann U, 2002, FERROELECTRICS, V271, P1905, DOI 10.1080/00150190211494
  • [5] Grossmann M., 1998, Integrated Ferroelectrics, V22, P83, DOI 10.1080/10584589808208032
  • [6] Influence of precursor chemistry on the formation of MTiO3 (M = Ba, Sr) ceramic thin films
    Hasenkox, U
    Hoffmann, S
    Waser, R
    [J]. JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY, 1998, 12 (02) : 67 - 79
  • [7] Variations of the leakage current density and the dielectric constant of Pt/(Ba,Sr)TiO3/Pt capacitors by annealing under a N2 atmosphere
    Hwang, CS
    Joo, SH
    [J]. JOURNAL OF APPLIED PHYSICS, 1999, 85 (04) : 2431 - 2436
  • [8] Depletion layer thickness and Schottky type carrier injection at the interface between Pt electrodes and (Ba, Sr)TiO3 thin films
    Hwang, CS
    Lee, BT
    Kang, CS
    Lee, KH
    Cho, HJ
    Hideki, H
    Kim, WD
    Lee, SI
    Lee, MY
    [J]. JOURNAL OF APPLIED PHYSICS, 1999, 85 (01) : 287 - 295
  • [9] A review of high dielectric materials for DRAM capacitors
    Kotecki, DE
    [J]. INTEGRATED FERROELECTRICS, 1997, 16 (1-4) : 1 - 19
  • [10] Point defect equilibrium in strontium titanate thin films
    McIntyre, PC
    [J]. JOURNAL OF APPLIED PHYSICS, 2001, 89 (12) : 8074 - 8084