Measuring the surface roughness of sputtered coatings by microgravimetry

被引：18

作者：

Carolus, MD ^{[1
]}

Bernasek, SL ^{[1
]}

Schwartz, J ^{[1
]}

机构：

[1] Princeton Univ, Dept Chem, Princeton, NJ 08544 USA

来源：

LANGMUIR | 2005年 / 21卷 / 09期

关键词：

D O I：

10.1021/la0470582

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A novel application of quartz crystal microgravimetry is described to enable determination of the roughness of native and sputtered oxide coatings. The technique is applicable to coatings that may be too rough for accurate atomic force microscopic imaging where measurements may be limited by the dimensions of the probe tip.

引用

页码：4236 / 4239

页数：4

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