A queueing network model for semiconductor manufacturing

被引：87

作者：

Connors, DP ^{[1
]}

Feigin, GE ^{[1
]}

Yao, DD ^{[1
]}

机构：

[1] COLUMBIA UNIV,DEPT IND ENGN & OPERAT RES,NEW YORK,NY 10027

来源：

IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 1996年 / 9卷 / 03期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1109/66.536112

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We develop an open queueing network model for rapid performance analysis of semiconductor manufacturing facilities. While the use of queueing models for performance evaluation of manufacturing systems is not new, our approach differs from others in the detailed ways in which we model the different tool groups found in semiconductor wafer fabrication, as well as the way in which we characterize the effect of rework and scrap on wafer lot sizes. As an application of the model, we describe a method for performing tool planning for semiconductor lines, The method is based on a marginal allocation procedure which uses performance estimates from the queueing network model to determine the number of tools needed to achieve a target cycle time, with the objective being to minimize overall equipment cost.

引用

页码：412 / 427

页数：16

共 23 条

[1] TRADEOFF CURVES, TARGETING AND BALANCING IN MANUFACTURING QUEUING-NETWORKS [J].

BITRAN, GR ;

TIRUPATI, D .

OPERATIONS RESEARCH, 1989, 37 (04) :547-564

[2] APPROXIMATIONS FOR PRODUCT DEPARTURES FROM A SINGLE-SERVER STATION WITH BATCH PROCESSING IN MULTI-PRODUCT QUEUES [J].

BITRAN, GR ;

TIRUPATI, D .

MANAGEMENT SCIENCE, 1989, 35 (07) :851-878

[3]

Buzacott J. A., 1986, Queueing Systems Theory and Applications, V1, P5, DOI 10.1007/BF01149326

[4]

Buzacott J.A., 1993, STOCHASTIC MODELS MA

[5] FLEXIBLE MANUFACTURING SYSTEMS - A REVIEW OF ANALYTICAL MODELS [J].

BUZACOTT, JA ;

YAO, DD .

MANAGEMENT SCIENCE, 1986, 32 (07) :890-905

[6]

Buzacott JA, 1994, SPRING S OPERAT RES, P1

[7]

Chandy K., 1978, ACM COMPUT SURV, V10, P281

[8] SCHEDULING SEMICONDUCTOR LINES USING A FLUID NETWORK MODEL [J].

CONNORS, D ;

FEIGIN, G ;

YAO, D .

IEEE TRANSACTIONS ON ROBOTICS AND AUTOMATION, 1994, 10 (02) :88-98

[9]

CROMIE MV, 1989, OPER RES QUART, V27, P733

[10]

DEUERMEYER BL, 1991, APPROACH SUTOMATIC M

← 1 2 3 →