Structural and optical properties of laser deposited ferroelectric (Sr0.2Ba0.8)TiO3 thin films

被引:56
作者
Cheng, HF
机构
[1] Department of Physics, National Taiwan Normal University
关键词
D O I
10.1063/1.362346
中图分类号
O59 [应用物理学];
学科分类号
摘要
Laser deposition technique has been applied to synthesize (Sr0.2Ba0.8)TiO3 thin films. The crystal structure of the films and the effect of deposition parameters on them have been systematically examined. Among the important deposition parameters, the substrate temperature and the chamber oxygen pressure affect the characteristics of the films most prominently. The crystalline phase of (Sr0.2Ba0.8)TiO3 films can only be obtained when the substrate temperature is higher than 550 degrees C. Furthermore, both, the low deposition oxygen pressure and the high substrate temperature during deposition facilitate the formation of (100) grains. The metal-insulator-metal structure of the films deposited on Pt-coated Si substrates, possesses good ferroelectric properties, which are indicated by butterfly-shaped capacitance-voltage characteristics and demonstrated by hysteresis loop of remanence P-r = 1.56 mu C/cm(2) and coercivity E(c) = 13.5 kV/cm. The charge-discharge test reveals that the effective dielectric constant can reach a value as high as epsilon(r) = 788. The energy gap (E(g)) and index of refraction (n) are estimated to be E(g) = 2.8 eV and n=1.68-1.73, respectively. (C) 1996 American Institute of Physics.
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页码:7965 / 7971
页数:7
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