Micromachining of a piezocomposite transducer using a copper vapor laser

被引：36

作者：

Farlow, N ^{[1
]}

Galbraith, W

Kowles, M

Hayward, G

机构：

[1] Univ Strathclyde, Ctr Ultrason Engn, Glasgow G1 1XW, Lanark, Scotland

[2] Oxford Lasers Ltd, Abington OX14 3YR, Oxon, England

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2001年 / 48卷 / 03期

关键词：

D O I：

10.1109/58.920684

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

A 1-3 piezocomposite transducer with front face dimensions of 2 x 2 mm has been micromachined using a copper vapor laser. The device consists of PZT5A piezoceramic pillars with a 65-mum pitch suspended in a low viscosity thermosetting polymer. The kerf width is 13 mum, and the transducer thickness is 170 mum, making the device suitable for ultrasonic reception at frequencies close to 10 MHz.

引用

页码：639 / 640

页数：2

共 3 条

[1] PIEZOELECTRIC COMPOSITE-MATERIALS FOR ULTRASONIC TRANSDUCER APPLICATIONS .1. RESONANT MODES OF VIBRATION OF PZT ROD POLYMER COMPOSITES
GURURAJA, TR
SCHULZE, WA
CROSS, LE
NEWNHAM, RE
AULD, BA
WANG, YJ
[J]. IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1985, 32 (04): : 481 - 498
[2] PIEZOELECTRIC COMPOSITE-MATERIALS FOR ULTRASONIC TRANSDUCER APPLICATIONS .2. EVALUATION OF ULTRASONIC MEDICAL APPLICATIONS
GURURAJA, TR
SCHULZE, WA
CROSS, LE
NEWNHAM, RE
[J]. IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1985, 32 (04): : 499 - 513
[3] SAVAKUS HP, 1980, MAT RES B, V16, P667

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