Line scale comparison Nano3

被引：1

作者：

Bosse, H ^{[1
]}

Hässler-Grohne, W ^{[1
]}

Flügge, J ^{[1
]}

Köning, R ^{[1
]}

机构：

[1] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany

来源：

RECENT DEVELOPMENTS IN TRACEABLE DIMENSIONAL MEASUREMENTS II | 2003年 / 5190卷

关键词：

line scale; international comparison; metrology institutes; measurement uncertainties; reference values;

D O I：

10.1117/12.506894

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

This contribution will report on the results of the international line scale comparison Nano3, which was carried out between 2000 and 2003. The comparison was initiated by the BIPM working group on nanometrology as one of five comparisons in the field of nanometrology. Two high quality line scales of Zerodur and quartz with 280 min graduations were chosen as transfer standards. They were measured by 13 national metrology institutes from 4 different metrology regions. The measurement uncertainties which were evaluated by the participants over the 280 min length showed a variation from about 300 rim down to 30 rim.

引用

页码：122 / 133

页数：12

共 9 条

[1] LONG-TERM STABILITY OF THE GLASS-CERAMIC ZERODUR SAMPLES AT ROOM-TEMPERATURE
BAYERHELMS, F
DARNEDDE, H
EXNER, G
[J]. METROLOGIA, 1985, 21 (02) : 49 - 57
[2] BOSSE H, 2001, P 2 EUSP INT C, V1, P302
[3] Status of the nanometer comparator at PTB
Flügge, J
Köning, R
[J]. RECENT DEVELOPMENTS IN TRACEABLE DIMENSIONAL MEASUREMENTS, 2001, 4401 : 275 - 283
[4] INTERNATIONAL COMPARISON OF MEASUREMENTS OF LINE SCALES (1976-1984)
HAMON, J
GIACOMO, P
CARRE, P
[J]. METROLOGIA, 1987, 24 (04) : 187 - 194
[5] PIELES H, 1991, PTB-MITT, V101, P403
[6] ROTH KD, 1993, MICROCIRCUIT ENG
[7] SCHODEL R, 2002, P 3 INT C 4 GEN M EU, V2, P691
[8] Wöger W, 1999, PTB-MITT, V109, P24
[9] 1994, LINE SCALE MEASUREME

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