Rapid fabrication of high quality self-assembled nanometer gold particles by spin coating method

被引：64

作者：

Liu, FK

Chang, YC

Ko, FH

Chu, TC

Dai, BT

机构：

[1] Natl Nano Dev Lab, Hsinchu, Taiwan

[2] Natl Tsing Hua Univ, Dept Nucl Sci, Hsinchu, Taiwan

来源：

MICROELECTRONIC ENGINEERING | 2003年 / 67-8卷

关键词：

self-assembled; spin coating; gold nanoparticles; rapid fabrication;

D O I：

10.1016/S0167-9317(03)00175-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports the fabrication of self-assembled gold nanoparticles attached to 3-aminopropyltrimethoxysilane (APTMS) modified fused silica substrates by the spin coating method. With the spin coating method, the gold nanoparticles can be fabricated on fused silica substrates with highly packing density in a short processing time. Our results clearly demonstrate that the spin coating method takes advantages of shorter fabrication time, higher uniformity, and better reproducibility when compared with the traditional immersion method. (C) 2003 Elsevier Science B.V. All rights reserved.

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收藏

页码：702 / 709

页数：8

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