Low-power micro gas sensor

被引：44

作者：

Lee, DD ^{[1
]}

Chung, WY ^{[1
]}

Choi, MS ^{[1
]}

Baek, JM ^{[1
]}

机构：

[1] SEMYUNG UNIV,DEPT ELECT ENGN,JECHEON 39023,SOUTH KOREA

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 33卷 / 1-3期

关键词：

finite-element method; gas sensors; microheaters;

D O I：

10.1016/0925-4005(96)01822-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The stable and low-power heating characteristics of a microheater are very important for the micro gas sensor. Membrane-type gas' sensors have been fabricated by silicon IC technology. Steady-state thermal analysis by the finite-element method is performed to optimize the thermal properties of the gas sensor. From the analysis, the desirable size of the microheater for low power consumption is determined. The heating properties of fabricated poly-Si and Pt microheaters have been tested. The sensing characteristics of the packaged microsensor are also examined.

引用

页码：147 / 150

页数：4

共 6 条

[1] TIN OXIDE MICROSENSOR FOR LPG MONITORING [J].