A study on the chemical spray deposition of zinc oxide thin films and their structural and electrical properties

Undoped zinc oxide films have been prepared by chemical spray pyrolysis technique. X-ray diffraction studies have shown polycrystalline nature of the films with a hexagonal wurzite type structure. The preferential orientation of the film is found to be sensitive to substrate temperature. Annealing in vacuum has reduced the resistivity of the films and the lowest value obtained was 3.15 x 10-3 Omega m. The optical transmittance of the films in the visible region was found to be better than 95% in the near-infrared and visible region. (C) 1999 Elsevier Science S.A. Ail rights reserved.