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Two-dimensional micro optical scanner excited by PZT thin film microactuator
被引：10
作者：
Goto, H
[1
]
机构：
[1] OMRON Corp, Cent R&D Lab, Tsukuba, Ibaraki 3004247, Japan
来源：
OPTOELECTRONIC MATERIALS AND DEVICES
|
1998年
/
3419卷
关键词：
micromachining;
thin film;
optical scanner;
two-dimensional;
resonator;
microactuator;
silicon;
PZT;
integration;
piezoresistor;
D O I：
10.1117/12.311013
中图分类号：
O43 [光学];
学科分类号：
070207 ;
0803 ;
摘要：
A silicon micromachined resonance type two-dimensional micro optical scanner has been developed for miniaturization of optical scanning sensors such as a bar-code reader, a laser range finder, a shape recognition sensor and so on. A PZT thin film microactuator is adopted to the actuator of the micro scanner in order to miniaturize the actuator and decrease the operation voltage. The scanner, 2mm X 4mm in size, consisting of a resonator with two degrees of freedom and a PZT thin film microactuator for excitation of the resonator and the strain detector for scanning position detection is capable of two dimensional optical scanning with wide scanning angle at, low applied voltage and detection of the scanning position. A miniature scanning image sensor and a range sensor could be realized using the micro scanner.
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页码：227 / 235
页数：9
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