How to optimize the design of a quantitative HREM experiment so as to attain the highest precision

被引：23

作者：

den Dekker, AJ ^{[1
]}

Sijbers, J ^{[1
]}

van Dyck, D ^{[1
]}

机构：

[1] Univ Antwerp, Dept Phys, B-2020 Antwerp, Belgium

来源：

JOURNAL OF MICROSCOPY-OXFORD | 1999年 / 194卷

关键词：

experimental design; parameter estimation; precision; quantitative high resolution electron microscopy; resolution;

D O I：

10.1046/j.1365-2818.1999.00473.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Using parameter estimation theory, an expression is derived for the maximum precision with which the position of a single atom can be estimated from high resolution transmission electron microscopy images. This expression, being a complicated function of the object as well as of the microscope parameters and the electron dose, can be used to optimize the design of an HREM experiment so as to attain the highest precision.

引用

页码：95 / 104

页数：10

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