Studies on atmospheric plasma abatement of PFCs

被引：44

作者：

Radoiu, MT ^{[1
]}

机构：

[1] BOC Edwards, Exhaust Gas Management, N Somerset BS21 6TH, Clevedon, England

来源：

RADIATION PHYSICS AND CHEMISTRY | 2004年 / 69卷 / 02期

关键词：

atmospheric plasmas; PFCs; destruction and removal efficiencies; microwaves;

D O I：

10.1016/S0969-806X(03)00455-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Microwave plasma at 2.45 GHz frequency operating at atmospheric pressure in synthetic gas mixtures containing N-2, CF4, C2F6, CHF3, and SF6 were investigated experimentally for various gas mixture constituents and operating conditions, with respect to their ability to destroy perfluorocompounds. It was found that the destruction and removal efficiency (DRE) of the process is highly dependent on the total gas flow. DREs of up to 99.9% have been achieved using 1.8 kW of microwave power at 201/min total flow rate. (C) 2003 Elsevier Ltd. All rights reserved.

引用

页码：113 / 120

页数：8

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