Varied-line-spacing laminar-type holographic grating for the standard soft X-ray flat-field spectrograph

被引：24

作者：

Koike, M ^{[1
]}

Namioka, T ^{[1
]}

Gullikson, E ^{[1
]}

Harada, Y ^{[1
]}

Ishikawa, S ^{[1
]}

Imazono, T ^{[1
]}

Mrowka, S ^{[1
]}

Miyata, N ^{[1
]}

Yanagihara, M ^{[1
]}

Underwood, JH ^{[1
]}

Sano, K ^{[1
]}

Ogiwara, T ^{[1
]}

Yoda, O ^{[1
]}

Nagai, S ^{[1
]}

机构：

[1] Japan Atom Energy Res Inst, Adv Photon Res Ctr, Kizu, Kyoto 6190215, Japan

来源：

SOFT X-RAY AND EUV IMAGING SYSTEMS | 2000年 / 4146卷

关键词：

diffraction grating; holographic grating; diffraction efficiency; spectrometer; flat-field spectrograph; soft X-ray;

D O I：

10.1117/12.406669

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An aspheric wave-front recording system was designed to produce a holographic grating for use in a standard soft X-ray flat-field spectrograph interchangeably with a mechanically ruled varied-line-spacing (VLS) grating. The grating grooves recorded with the designed aspheric wave-front recording system were processed to form a laminar groove profile by means of reactive ion etching. Measurements done with synchrotron radiation and a laboratory X-ray source are reported for this laminar-type grating and a commercial grating replicated from a mechanically ruled VLS grating that was specifically designed and fabricated for the standard soft X-ray flat-field spectrograph. The laminar-type holographic grating is found to have an absolute first-order efficiency of similar to 10% for wavelengths of similar to4.5-12 nm. It is also shown that the holographic grating is effective in suppressing the higher orders and stray-light level for soft X-ray of 4.36 nm (C-K) and has a comparable spectral resolution to the replica VLS grating.

引用

页码：163 / 170

页数：8

共 19 条

[1] MULTICHANNEL GRAZING-INCIDENCE SPECTROMETER FOR PLASMA IMPURITY DIAGNOSIS - SPRED [J].

FONCK, RJ ;

RAMSEY, AT ;

YELLE, RV .

APPLIED OPTICS, 1982, 21 (12) :2115-2123

[2] MECHANICALLY RULED ABERRATION-CORRECTED CONCAVE GRATINGS [J].

HARADA, T ;

KITA, T .

APPLIED OPTICS, 1980, 19 (23) :3987-3993

[3]

HUTLEY MC, 1982, DIFFRACTION GRATINGS, V6, P263

[4]

ISHIGURO E, 1992, P SOC PHOTO-OPT INS, V1739, P592

[5] MECHANICALLY RULED ABERRATION-CORRECTED CONCAVE GRATINGS FOR A FLAT-FIELD GRAZING-INCIDENCE SPECTROGRAPH [J].

KITA, T ;

HARADA, T ;

NAKANO, N ;

KURODA, H .

APPLIED OPTICS, 1983, 22 (04) :512-513

[6] Application of the hybrid design method to VUV double-element optical systems equipped with holographic gratings recorded with aspheric wave fronts [J].

Koike, M ;

Ueno, Y ;

Namioka, T .

GRATINGS AND GRATING MONOCHROMATORS FOR SYNCHROTRON RADIATION, 1997, 3150 :31-39

[7]

Koike M., 1988, Proceedings of the SPIE - The International Society for Optical Engineering, V815, P96

[8] Plane gratings for high-resolution grazing-incidence monochromators: holographic grating versus mechanically ruled varied-line-spacing grating [J].

Koike, M ;

Namioka, T .

APPLIED OPTICS, 1997, 36 (25) :6308-6318

[9] Design of holographic gratings recorded with aspheric wave-front recording optics for soft X-ray flat-field spectrographs [J].

Koike, M ;

Yamazaki, T ;

Harada, Y .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1999, 101 :913-918

[10] Aberration theory and a design method of double-element optical systems [J].

Masui, S ;

Namioka, T .

DESIGN AND ENGINEERING OF OPTICAL SYSTEMS II, 1999, 3737 :498-508

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