Electrode formation by electrophoretic deposition of nanopowders

被引：23

作者：

Ogata, N ^{[1
]}

Van Tassel, J ^{[1
]}

Randall, CA ^{[1
]}

机构：

[1] Penn State Univ, Dept Mat Sci & Engn, Ctr Dielect Studies, Mat Res Lab, University Pk, PA 16802 USA

来源：

MATERIALS LETTERS | 2001年 / 49卷 / 01期

关键词：

nanopowders; electrophoretic deposition; electrodes; thick film; passive components;

D O I：

10.1016/S0167-577X(00)00332-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This study considers electrophoretic deposition (EPD) of silver nanoparticles as a process to form electrode layers for electroceramic applications. Silver powder with spherical morphologies with diameters = 10 nm are dispersed in non-aqueous suspensions and deposited with excellent control of both surface roughness and particle packing. These deposits are then sintered into dense homogeneous films. Electrodes are also patterned into microstripline structures with 15 mum lines and coplanar coils on Al2O3 substrates with a photolithographic process. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：7 / 14

页数：8

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