Integrated micro-optomechanical laser beam deflector

被引：4

作者：

Petroz, K ^{[1
]}

Grateau, H ^{[1
]}

Ollier, E ^{[1
]}

Mottier, P ^{[1
]}

机构：

[1] CEA, LETI, Microtechnol Dept, F-38054 Grenoble 9, France

来源：

ELECTRONICS LETTERS | 1998年 / 34卷 / 09期

关键词：

D O I：

10.1049/el:19980594

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A laser beam microdeflector which is Fully integrated on a silicon substrate is presented. The design combines a steering system of cylindrical microlenses and a set of electrostatic combs. Both mechanical and optical parts are etched into a silica layer to provide a simple technological process and widen the operational wavelength range. Furthermore, the design, associated with silicon surface micromachining technology, enables more than 700 chips to be produced on a 100mm diameter wafer.

引用

页码：881 / 882

页数：2