Fabrication and experiment of a planar micro ion drag pump

被引：76

作者：

Ahn, SH ^{[1
]}

Kim, YK ^{[1
]}

机构：

[1] Seoul Natl Univ, Sch Elect Engn, Kwanak Gu, Seoul 151742, South Korea

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 70卷 / 1-2期

关键词：

electrohydrodynamics; micropump; ion drag pump; ion injection;

D O I：

10.1016/S0924-4247(98)00105-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A micro ion drag pump with planar electrodes on a grass substrate is fabricated and tested. The pump consists of a planar electrode pair array driven by DC voltage using unipolar conduction. Ethyl alcohol is pumped in both directions, and the flow rate and the pressure are measured in channels of depth 100 mu m or 200 mu m and width tired at 3 mm. It is found that the pump can be fabricated easily and at a lower cost than the micro ion drag pumps previously investigated. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：1 / 5

页数：5

共 12 条

[1]

CHOI JW, 1997, T IEE JPN E, V117, P170

[2]

Crowley J. M., 1986, FUNDAMENTALS APPL EL

[3] SELECTING A WORKING FLUID TO INCREASE THE EFFICIENCY AND FLOW-RATE OF AN EHD PUMP [J].

CROWLEY, JM ;

WRIGHT, GS ;

CHATO, JC .

IEEE TRANSACTIONS ON INDUSTRY APPLICATIONS, 1990, 26 (01) :42-49

[4] TRAVELING WAVE-DRIVEN MICROFABRICATED ELECTROHYDRODYNAMIC PUMPS FOR LIQUIDS [J].

FUHR, G ;

SCHNELLE, T ;

WAGNER, B .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1994, 4 (04) :217-226

[5] Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropump [J].

Furuya, A ;

Shimokawa, F ;

Matsuura, T ;

Sawada, R .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1996, 6 (03) :310-319

[6] ION DRAG PUMPING .2. EXPERIMENT [J].

PICKARD, WF .

JOURNAL OF APPLIED PHYSICS, 1963, 34 (02) :251-&

[7] ION DRAG PUMPING .1. THEORY [J].

PICKARD, WF .

JOURNAL OF APPLIED PHYSICS, 1963, 34 (02) :246-&

[8]

Richter A., 1990, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.90CH2832-4), P99, DOI 10.1109/MEMSYS.1990.110257

[9]

Richter A., 1991, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.91CH2957-9), P271, DOI 10.1109/MEMSYS.1991.114809

[10] ION DRAG PRESSURE GENERATION [J].

STUETZER, OM .

JOURNAL OF APPLIED PHYSICS, 1959, 30 (07) :984-994

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