RBS with monolayer resolution

被引：21

作者：

Kimura, K

Mannami, M

机构：

[1] Department of Engineering Science, Kyoto University

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1996年 / 113卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(95)01326-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A 90 degrees sector magnetic spectrometer (delta E/E similar to 0.1%) is utilized for high-resolution Rutherford backscattering spectroscopy (HRBS). The ions scattered from successive atomic layers can he resolved as separated peaks in the energy spectrum at grazing exit angles. It is shown that both high-energy resolution and the grazing angle technique are essential to the monolayer resolution. Results of some applications of HRBS are presented.

引用

页码：270 / 274

页数：5

共 16 条

[1]

ANDERSEN HH, 1977, STOPPING RANGES IONS

[2]

[Anonymous], SITZUNGSBER AK 2B MN

[3] RUTHERFORD SCATTERING OF PROTONS IN SURFACE LAYERS OF A TUNGSTEN SINGLE CRYSTAL [J].