Investigation of thickness effects on AlN coated metal tips by in situ I-V measurement

被引：9

作者：

Kang, DH

Zhirnov, VV

Wojak, GJ

Preble, EA

Choi, WB

Hren, JJ

Cuomo, JJ

机构：

[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA

[2] Inst Crystallog, Moscow 117333, Russia

[3] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1999年 / 17卷 / 02期

关键词：

D O I：

10.1116/1.590608

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The effects of the aluminum nitride coating thickness on molybdenum emitter tips were investigated by an in situ I-V measurement technique inside a typical magnetron sputtering system. ALN was deposited on Mo tips using a de-modulated 1 kW power source at 200 degrees C. Each I/V measurement was carried out immediately following a 15 a ALN deposition. Significantly improved field emission was observed as well as a strong emission thickness dependence, which we attribute to the influence of space charge. (C) 1999 American Vacuum Society. [S0734-211X(99)04002-0].

引用

页码：632 / 634

页数：3

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