A MEMS thermopneumatic silicone membrane valve

被引：18

作者：

Yang, X

Grosjean, C

Tai, YC

Ho, CM

机构：

来源：

MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS | 1997年

关键词：

D O I：

10.1109/MEMSYS.1997.581782

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A technology for fabricating silicone rubber membranes and integrating them with other processes on a silicon wafer has been developed. Silicone rubber has been found to have exceptional mechanical properties including low modulus, high elongation, and good sealing. An integrated normally open valve using a silicone rubber membrane and 3M PF5060 liquid for thermopneumatic actuation has been fabricated and tested. For a 1.3 1pm air flow, 280 mW is required to close the valve at 20 PSI inlet pressure. Due to the high permeability of silicone rubber, most liquids used in thermopneumatic systems will be lost, necessitating more work to find a suitable barrier material compatible with silicone rubber.

引用

页码：114 / 118

页数：5