VCSEL applications in sensors and microsystems

被引：5

作者：

Warren, ME ^{[1
]}

Carson, RF ^{[1
]}

Sweatt, WC ^{[1
]}

Wendt, JR ^{[1
]}

Nevers, JA ^{[1
]}

Crawford, MH ^{[1
]}

Hou, HQ ^{[1
]}

机构：

[1] Sandia Natl Labs, Albuquerque, NM 87185 USA

来源：

VERTICAL-CAVITY SURFACE-EMITTING LASERS II | 1998年 / 3286卷

关键词：

vertical-cavity surface-emitting lasers; diffractive optics; sensors; microsystems; position sensing; chemical analysis; capillary electrophoresis; capillary electrochromatography; fluorescence spectrometer; substrate-mode optical interconnects;

D O I：

10.1117/12.305467

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Vertical-cavity surface-emitting lasers (VCSELs) are uniquely suited to miniaturized free-space optical systems in which surface-mounting and hybrid assembly techniques can be used to combine different technologies together. Two examples are described of such microsystems that are being developed for sensing applications, The first example is a optical position sensing system for rotating parts, Progress on fabricating similar systems by flip-chip bonding techniques is then discussed. The second example is a chemical sensing/analysis system which uses a miniature fluorescence detection module that is based on surface-mounted VCSELs and diffractive optical elements. The detection module is integrated with a capillary electrochromatography separation system and uses substrate-mode light propagation to focus the VCSEL beam on the capillary channel.

引用

页码：42 / 51

页数：10