Microtribological investigations of stick/slip phenomena using a novel oscillatory friction and adhesion tester

A novel friction and adhesion tester bridging the gap between macro-and nanotribology is introduced. A friction and/or adhesion induced deflection of a spring is detected using a high-resolution laser interferometer. Unlike force microscopes, where a sharp tip interacts with the surface, this approach allows two plane substrates to be brought into contact. In this way, the exact tribological analysis of microtechnological devices is possible. Since the tester can be operated in air as well as under high vacuum conditions, the environment can be controlled over a wide range. Using this tester, micro-stick/slip phenomena have been investigated as a function of sliding velocity, surface morphology, normal force and contact area. All experiments presented in this paper were carried out on air.