Fabrication of three-dimensional micro-structures: Microtransfer molding

Microtransfer molding is a new technique for rapidly fabricating micrometer-scale structures over large areas (3.5 cm x 0.8 cm). This new technique, which involves the solidification of a liquid precursor in an elastomeric mold, can generate microstructures of organic polymers and ceramics such as that shown in the Figure on both planar and contoured surfaces and is able to make three-dimensional structures layer by layer.