Micro-patterned electret for high power electrostatic motor

被引：7

作者：

Genda, T ^{[1
]}

Tanaka, S ^{[1
]}

Esashi, M ^{[1
]}

机构：

[1] Tohoku Univ, Dept Mechatron & Precis Engn, Sendai, Miyagi 980, Japan

来源：

MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2004年

关键词：

D O I：

10.1109/MEMS.2004.1290624

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes the charging method of a micro-patterned electret for a high power electrostaic motor. By applying contact electrification using mercury to electret charging, charging to 5 mum-wide micro-patterned electret was achieved. But, 0.9 mum-wide edges of the electret is not charged due to discharge at the edges. Using this method, a silicon-dioxide electret with 0.5 mum thickness was charged up to a charge density of about -100 V/mumSiO(2) with fair repeatability.

引用

页码：470 / 473

页数：4

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