Micromachined strain gauges for the determination of liquid flow friction coefficients in microchannels

In this research program, we have performed and tested cupro-nickel (Cu-Ni) strain gauges micromachined on different sorts of silicon nitride (Si3N4) membranes. The design of the gauges obeys an electrical Wheatstone bridge configuration. We have found a good agreement between the expected electromechanical response of the bridge and the experimental signals. The results have displayed sensitivity to static pressure ranging from 50 to 100 muV V-1 bar(-1) as a function of the thickness and of the diameter of the membranes. This is part of a study devoted to determining liquid flow friction coefficients in silicon-Pyrex microchannels. Preliminary attempts (Reynolds number up to 300) made using global pressure measurements and with very simple local pressure probes are discussed. Further experiments using Cu-Ni strain gauges are described. Their micromachining, characterization and integration along silicon microchannels are presented. These sensors permitted us to perform the first local and reliable pressure drop measurements in a 7.5 mum deep microchannel. The results are in good agreement with the classical laminar theory for a Reynolds number ranging from 0.2 to 3.