Effect of grain size on actuator properties of piezoelectric ceramics

被引：23

作者：

Hackenberger, W ^{[1
]}

Pan, MJ ^{[1
]}

Vedula, V ^{[1
]}

Pertsch, P ^{[1
]}

Cao, WW ^{[1
]}

Randall, C ^{[1
]}

Shrout, T ^{[1
]}

机构：

[1] TRS Ceram Inc, State Coll, PA 16801 USA

来源：

SMART STRUCTURES AND MATERIALS 1998: SMART MATERIALS TECHNOLOGIES | 1998年 / 3324卷

关键词：

fine grain piezoelectrics; actuators; prestress; mechanical strength; grain size;

D O I：

10.1117/12.316878

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

Properties of piezoelectric ceramics important for actuator applications have been measured as a function of grain size. Fine grain piezoelectrics (less than or equal to 1 mu m) have been found to exhibit improved machinability and increased mechanical strength over conventional materials. Actuators made from fine grain ceramic are, therefore, expected to have improved reliability, higher driving fields, and lower driving voltages (from thinner layers in stacked or co-fired actuators) over devices fabricated from conventional materials. TRS Ceramics in collaboration with the Pennsylvania State University's Materials Research Laboratory, has developed fine grain piezoelectric ceramics with minimal or no reduction in piezoactivity. New chemical doping strategies designed to compensate ferroelectric domain clamping effects from grain boundaries have been successful in yielding submicron grain sized ceramics with both low and high field properties equivalent to conventional materials. In the case of Type II ceramics, reduced grain size results in a very stable domain state with respect to both electric field and compressive prestress. Work is in progress to develop both epoxy bonded stack and co-fired actuators from fine grain piezoelectrics.

引用

页码：28 / 36

页数：9