Limit of resolution of a standing wave atom optical lens

被引:8
作者
Behringer, RE
Natarajan, V
Timp, G
Tennant, DM
机构
[1] Bell Laboratories, Lucent Technologies, Murray Hill
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1996年 / 14卷 / 06期
关键词
D O I
10.1116/1.588647
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Using a Gaussian standing wave at lambda=589 nm as an atom optical lens, we have focused a thermal atomic sodium beam. We have examined the limits of the resolution of this focusing technique, and have made structures with linewidths of 13 nm and contrast of 6:1 with a short focal length atom optical lens. While numerical simulations predict that smaller structures should be attainable with shorter focal lengths, we find that the resolution deteriorates for focal length shorter than f approximate to 16 mu m. (C) 1996 American Vacuum Society.
引用
收藏
页码:4072 / 4075
页数:4
相关论文
共 10 条
[1]  
BEHRINGER RE, 1989, J OPT SOC AM B, V6, P2023
[2]  
BEHRINGER RE, IN PRESS APPL SURF S
[3]   CALCULATION OF ATOMIC POSITIONS IN NANOMETER-SCALE DIRECT-WRITE OPTICAL LITHOGRAPHY WITH AN OPTICAL STANDING-WAVE [J].
BERGGREN, KK ;
PRENTISS, M ;
TIMP, GL ;
BEHRINGER, RE .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1994, 11 (07) :1166-1176
[4]  
DALIBARD J, 1985, J OPT SOC AM B, V2, P1701
[5]   LASER COOLING BELOW A PHOTON RECOIL WITH 3-LEVEL ATOMS [J].
KASEVICH, M ;
CHU, S .
PHYSICAL REVIEW LETTERS, 1992, 69 (12) :1741-1744
[6]   ATOM-OPTICAL PROPERTIES OF A STANDING-WAVE LIGHT-FIELD [J].
MCCLELLAND, JJ .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1995, 12 (10) :1761-1768
[7]   Nanolithography using a laser focused neutral atom beam [J].
Natarajan, V ;
Behringer, RE ;
Tennant, DM ;
Timp, G .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06) :2823-2827
[8]  
NATARAJAN V, IN PRESS PHYS REV B
[9]  
TANGUY C, 1983, OPT COMMUN, V44, P294
[10]  
TIMP G, UNPUB J OPT SOC AM B